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Fabrication and Characterization of MEMS-Based Structures from a Bio-Inspired, Chemo-Responsive Polymer Nanocomposite

Published online by Cambridge University Press:  20 January 2011

Allison E. Hess  and
Christian A.. Zorman
Allison E. Hess
Affiliation:
Department of Electrical Engineering and Computer Science, Case Western Reserve University, Cleveland, OH, 44106
Christian A.. Zorman
Affiliation:
Department of Electrical Engineering and Computer Science, Case Western Reserve University, Cleveland, OH, 44106 Advanced Platform Technology Center of Excellence, Louis Stokes Cleveland VA Medical Center, Cleveland, OH, 44106
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Abstract

This paper reports the development of micromachining processes, as well as electrical and mechanical evaluation of a stimuli-responsive, mechanically-dynamic polymer nanocomposite for biomedical microsystems. The nanocomposite, which consists of a cellulose nanofiber network embedded in a poly(vinyl acetate) matrix, was shown to display a switchable stiffness comparable to bulk samples, with a Young’s modulus of 3570 MPa in the dry state, which reduced to ~25 MPa in the wet state, with a stiff-to-flexible transition-time dependent on exposed surface area. Upon immersion in phosphate buffered saline, the ac resistance through the PVAc-TW thickness was found to reduce from 8.04 MΩ to ~17 kΩ. Electrochemical impedance of an Au electrode on PVAc-TW was found to be ~178 kΩ at 1 kHz, and this was found to be stable as the probe shank was flexed to compress the metal, but increased with increasing flex angle when the metal was flexed into a tensile state.

Keywords

microelectro-mechanical (MEMS)polymerstress/strain relationship
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1299: Symposium S – Microelectromechanical Systems—Materials and Devices IV , 2011 , mrsf10-1299-s04-07
Copyright
Copyright © Materials Research Society 2011

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References

REFERENCES

1. Najafi, K., Wise, K. D.and Mochizuki, Y., IEEE Transactions on Electron Devices 32, 1206 (1985).CrossRefGoogle Scholar
2. Nordhausen, C. T., Maynard, E. M. and Normann, R. A., Brain Research 726, 129–140 (1996).CrossRefGoogle Scholar
3. Szarowski, D. H., Andersen, M. D., Retterer, S., Spence, A. J., Isaacson, M., Craighead, H. G., Turner, J. N. and Shain, W., Brain Research 983, 23–35 (2003).Google Scholar
4. Lee, H., Bellamkonda, R. V., Sun, W. and Levenston, M. E., Journal of Neural Engineering 2, 81 (2005).CrossRefGoogle Scholar
5. Lee, K.-K., He, J., Singh, A., Massia, S., Ehteshami, G., Kim, B. and Raupp, G., Journal of Micromechanics and Microengineering 14, 32 (2004).CrossRefGoogle Scholar
6. Takeuchi, S., Ziegler, D., Yoshida, Y., Mabuchi, K. and Suzuki, T., Lab on a Chip 5, 519–523 (2005).CrossRefGoogle Scholar
7. Szulgit, G. and Shadwick, R., J Exp Biol 203, 1539–1550 (2000).CrossRefGoogle Scholar
8. Capadona, J. R., Shanmuganathan, K., Tyler, D. J., Rowan, S. J. and Weder, C., Science 319, 1370–1374(2008).CrossRefGoogle Scholar
9. Shanmuganathan, K., Capadona, J. R., Rowan, S. J. and Weder, C., ACS Applied Materials & Interfaces 2, 165–174(2009).CrossRefGoogle Scholar
10. Barnes, A., Hess, A., Zorman, C., Proceedings of the Technical Conference – 2010 Surface Mount Technology Associated International Conference, 2010.Google Scholar
11. Hess, A., Dunning, J., Harris, J., Capadona, J. R., Shanmuganathan, K., Rowan, S. J., Weder, C., Tyler, D. J. and Zorman, C. A., Proceedings of the Solid-State Sensors, Actuators and Microsystems Conference (Transducers) 2009.Google Scholar
12. Wise, K. D. and Angell, J. B., Biomedical Engineering, IEEE Transactions on BME-22, 212–219 (1975).CrossRefGoogle Scholar