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Depth of Penetration of the Plasma Fluorination Reaction into Various Polymers

Published online by Cambridge University Press:  22 February 2011

Eve A. Wildi ,
Gerald J. Scilla  and
Alan DeLuca
Eve A. Wildi
Affiliation:
Xerox Corporation, 800 Phillips Road, Webster, NY 14580
Gerald J. Scilla
Affiliation:
Xerox Corporation, 800 Phillips Road, Webster, NY 14580
Alan DeLuca
Affiliation:
Xerox Corporation, 800 Phillips Road, Webster, NY 14580
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Abstract

The surfaces of a variety of polymers presenting either primary, secondary, tertiary, vinyl or aromatic protons to the reactive gas environment were fluorinated by glow discharge treatment. Depth profiles of the plasma surface reaction were obtained by SIMS with oxygen ion sputtering. Further information was obtained from the appearance of ESCA traces of these substrates before and after the reaction.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 48: Symposium E – Applied Materials Characterization , 1985 , 79
Copyright
Copyright © Materials Research Society 1985

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References

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