We review the recently introduced technique of atomic-resolution chemical mapping in scanning transmission electron microscopy (STEM) based on energy-dispersive x-ray spectroscopy. Working at the atomic level is facilitated by ultrasensitive energy-dispersive x-ray detectors in combination with Cs-correction of the STEM probe. Details of the experimental implementation are discussed, and a theoretical framework within which the measured results can be understood is described. Three case studies are presented: the analysis of specimens of GaAs and SrTiO3, as well as examination of an interface between SrTiO3 and PbTiO3. Detailed theoretical simulations of the imaging process show that the projected positions of elements in atomic columns can be directly deduced from the chemical maps. For the core shells used, the effective ionization interaction is local and generally localized in the vicinity of the atoms being ionized. The local nature of the effective ionization potential means that this is an incoherent mode of imaging, akin to Z-contrast imaging but with additional chemical information.

In his now-famous 1959 speech on nanotechnology, Richard Feynman proposed that it should be possible to see the individual atoms in a material, if only the electron microscope could be made 100 times better. With the development of aberration correctors on transmission electron microscopes (TEMs) over the last decade, this dream of microscopists to directly image structures atom-by-atom has come close to an everyday reality. Figure 1 shows such a high-resolution transmission electron microscope (HR-TEM) image of a single-wall carbon nanotube obtained with an aberration-corrected TEM. Now that atomic-resolution images have become possible with aberration-corrector technology in both TEM and STEM, we can ask ourselves if we truly have achieved the goal of seeing individual atoms. Most aberration-corrected images exhibiting atomic resolution are not distinguishing individual atoms, but columns of a small number of atoms, so despite this remarkable achievement, there is still “plenty of room at the bottom” in order to move toward seeing, counting, and quantifying individual atoms. In fact, there never has been a more exciting time for electron microscopists.

Planar defects in a polycrystalline diamond film were studied by high-resolution transmission electron microscopy (HRTEM) and high-resolution scanning transmission electron microscopy (STEM). In both modes, sub-Ångström resolution was achieved by making use of two aberration-corrected systems; a TEM and a STEM CS-corrected microscope, each operated at 300 kV. For the first time, diamond in 〈110〉 zone-axis orientation was imaged in STEM mode at a resolution that allows for resolving the atomic dumbbells of carbon at a projected interatomic distance of 89 pm. Twin boundaries that show approximately the Σ3 CSL structure reveal at sub-Ångström resolution imperfections; that is, local distortions, which break the symmetry of the ideal Σ3 type twin boundary, are likely present. In addition to these imperfect twin boundaries, voids on the atomic level were observed. It is proposed that both local distortions and small voids enhance the mechanical toughness of the film by locally increasing the critical stress intensity factor.

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Extended abstract of a paper presented at the Pre-Meeting Congress: Materials Research in an Aberration-Free Environment, at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, July 31 and August 1, 2004.

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.