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2 results

  • Study of Titanium Nitrides Synthesized by High Dose Ion Implantation

  • M. Guemmaz, A. Mosser, D. Raiser, J.J. Grob, A. Cornet, S. Paletto
  • Journal:
    MRS Online Proceedings Library Archive / Volume 354 / 1994
    Published online by Cambridge University Press:
    21 February 2011, 243
    Print publication:
    1994

  • Polycrystalline titanium samples were implanted with N+ ions at high fluences and at several energies. The aim was to obtain 4000 Â thick nitrided layers of constant nominal concentration equal to 20% ,30%, and 40%.

    The results obtained by RBS showed a flat nitrogen distribution with depth and the measured concentrations were respectively 20%,31% and 38%.

    X-ray grazing incidence diffraction indicated that, at 20%, a nitrogen solid solution is formed in the a-Ti matrix. At 31% the nitrogen solid solution is present besides a 5-TiN phase and at 38% only the 5-TiN phase remains.

    From nanoindentation measurements, we derived the depth-related hardness and Young's modulus of the implanted samples. These values were compared to those found on titanium nitride layers obtained with other coating techniques.