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46 results

Page 1 of 3

  • A High Multiple Hits Correction Factor for Atom Probe Tomography

  • D.J. Larson, T.J. Prosa, E. Oltman, D.A. Reinhard, B.P. Geiser, R.M. Ulfig, A. Merkulov
  • Journal:
    / Volume 24 / Issue S1 / August 2018
    Published online by Cambridge University Press:
    01 August 2018, pp. 1084-1085
    Print publication:
    August 2018
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  • Approaches for Promoting Accurate Atom Probe Reconstruction

  • T.J. Prosa, B.P. Geiser, D. Reinhard, Y. Chen, D.J. Larson
  • Journal:
    / Volume 22 / Issue S3 / July 2016
    Published online by Cambridge University Press:
    25 July 2016, pp. 664-665
    Print publication:
    July 2016
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  • Atom probe tomography of nanoscale electronic materials

  • D.J. Larson, T.J. Prosa, D.E. Perea, K. Inoue, D. Mangelinck
  • Journal:
    MRS Bulletin / Volume 41 / Issue 1 / January 2016
    Published online by Cambridge University Press:
    08 January 2016, pp. 30-34
    Print publication:
    January 2016

  • As the characteristic length scale of electronic devices shrinks, so does the required scale for measurement techniques to provide useful feedback during development and fabrication. The current capabilities of atom probe tomography (APT), such as detecting a low number of dopant atoms in nanoscale devices or studying diffusion effects in a nanowire (NW), make this technique important for metrology on the nanoscale. Here we review recent APT investigations applied to transistors (including regions such as gate oxide, channel, source, drain, contacts, etc.), heterogeneous dopant incorporation in NWs, and Pt-based nanoparticles.

  • Performance Advances in LEAP systems

  • R.M. Ulfig, D.J. Larson, T.F. Kelly, P.H. Clifton, T.J. Prosa, D.R Lenz, E.X. Oltman
  • Journal:
    / Volume 20 / Issue S3 / August 2014
    Published online by Cambridge University Press:
    27 August 2014, pp. 1120-1121
    Print publication:
    August 2014
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  • Measurement of Detection Efficiency in Atom Probe Tomography

  • T.J. Prosa, B.P. Geiser, R.M. Ulfig, T.F. Kelly, D.J. Larson
  • Journal:
    / Volume 20 / Issue S3 / August 2014
    Published online by Cambridge University Press:
    27 August 2014, pp. 1160-1161
    Print publication:
    August 2014
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  • Progress in Planar Feature Spatial Reconstruction for Atom Probe Tomography

  • B.P. Geiser, D.J. Larson, T.J. Prosa, T.F. Kelly
  • Journal:
    / Volume 19 / Issue S2 / August 2013
    Published online by Cambridge University Press:
    09 October 2013, pp. 936-937
    Print publication:
    August 2013
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  • Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

  • Improved Mass Resolving Power and Yield in Atom Probe Tomography

  • D.J. Larson, T.J. Prosa, J.H. Bunton, D.P. Olson, D.F. Lawrence, E. Oltman, S.N. Strennin, T.F. Kelly
  • Journal:
    / Volume 19 / Issue S2 / August 2013
    Published online by Cambridge University Press:
    09 October 2013, pp. 994-995
    Print publication:
    August 2013
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  • Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

  • Application of Atom Probe Tomography to Atomic Layer Deposited Thin Films

  • A.D. Giddings, T.J. Prosa, T.F. Kelly, D.J. Larson
  • Journal:
    / Volume 19 / Issue S2 / August 2013
    Published online by Cambridge University Press:
    09 October 2013, pp. 1028-1029
    Print publication:
    August 2013
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  • Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

  • Atom Probe Tomography Analysis of a Gallium-Nitride-Based Commercial Light-Emitting Diode

  • T.J. Prosa, D. Olson, A.D. Giddings, W. Lefebvre, P.H. Clifton, D.J. Larson
  • Journal:
    / Volume 19 / Issue S2 / August 2013
    Published online by Cambridge University Press:
    09 October 2013, pp. 1014-1015
    Print publication:
    August 2013
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  • Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Page 1 of 3