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11 results

  • Automated image acquisition and analysis of beam sensitive samples

  • Eric Stach, Dmitri N. Zakharov, Yuewei Lin, Shinjae Yoo, Guenter Resch
  • Journal:
    / Volume 23 / Issue S1 / July 2017
    Published online by Cambridge University Press:
    04 August 2017, pp. 1788-1789
    Print publication:
    July 2017
    • Article
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  • Effect of deposition pressure on the microstructure and thermoelectric properties of epitaxial ScN(001) thin films sputtered onto MgO(001) substrates

  • Polina V. Burmistrova, Dmitri N. Zakharov, Tela Favaloro, Amr Mohammed, Eric A. Stach, Ali Shakouri, Timothy D. Sands
  • Journal:
    Journal of Materials Research / Volume 30 / Issue 5 / 14 March 2015
    Published online by Cambridge University Press:
    16 February 2015, pp. 626-634
    Print publication:
    14 March 2015

  • Four epitaxial ScN(001) thin films were successfully deposited on MgO(001) substrates by dc reactive magnetron sputtering at 2, 5, 10, and 20 mTorr in an Ar/N2 ambient atmosphere at 650 °C. The microstructure of the resultant films was analyzed by x-ray diffraction, scanning electron microscopy, and transmission electron microscopy. Electrical resistivity, electron mobility and concentration were measured using the room temperature Hall technique, and temperature dependent in-plain measurements of the thermoelectric properties of the ScN thin films were performed. The surface morphology and film crystallinity significantly degrade with increasing deposition pressure. The ScN thin film deposited at 20 mTorr exhibits the presence of <221> oriented secondary grains resulting in decreased electric properties and a low thermoelectric power factor of 0.5 W/mK2 at 800 K. The ScN thin films grown at 5 and 10 mTorr are single crystalline, yielding the power factor of approximately 2.5 W/mK2 at 800 K. The deposition performed at 2 mTorr produces the highest quality ScN thin film with the electron mobility of 98 cm2 V−1 s−1 and the power factor of 3.3 W/mK2 at 800 K.