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In this communication, results are presented of the application of etching
in molten E+M etch (KOH-NaOH eutectic mixture with 10% MgO) for studying
defects in GaN. The method was used to study defects on differently oriented
cleavage and basal planes of GaN single crystals, MOCVD-, MBE- and HVPE-grown
epitaxial layers and LD and LED structures.
Dislocations, dislocation loops and stacking faults have been revealed on
$(10\, \bar{\text{\scriptsize 1}}\, 0)$, $(1\,\bar{\text{\scriptsize 2}}\,10)$
and $\{0001\}$ Ga- and N-polar planes. Diversified etch pit morphology was
observed depending on the crystallographic orientation of the etched samples
and was correlated with the crystallographic symmetry of the GaN lattice.
Etching results were calibrated using TEM analysis.
We used single crystals of GaN, obtained from high-pressure synthesis, as substrates for Metalorganics Vapor Phase Epitaxy growth of violet and UV laser diodes. The use of high-quality bulk GaN leads to the decrease of the dislocation density to the low level of 105 cm−2, i.e. two orders of magnitude better than typical for the Epitaxial Lateral Overgrowth laser structures fabricated on sapphire. The low density and homogeneous distribution of defects in our structures enables the realization of broad stripe laser diodes. We demonstrate that our laser diodes, having 15 μm wide stripes, are able to emit 1.3-1.9 W per facet (50% reflectivity) in 30 ns long pulses. This result, which is among the best ever reported for nitride lasers, opens the path for the development of a new generation of high power laser diodes.
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