The process for generating films of Ba0.5Sr0.5TiO3, and PbZr0.48Ti0.52O3 by photochemical deposition from metal-organic thin films has been investigated. Films have also been prepared by metal-organic and sol-gel deposition for comparison with the photochemical method. All three methods could produce crystalline films of the target materials. Studies of the heating of the amorphous films prepared by each of the methods indicated that similar crystalline films could be prepared by the different methods. Under some conditions the photochemical methods gave the highest degree of orientation of the crystalline films.