In the current work an attempt was made to apply the fundamental parameter method to the analysis of boron, oxygen, fluorine and heavier components of silica glasses. Experimental results are presented and compared with calculations based on theoretical work. The specimens consist of sets of certified standards which were obtained from Breitlahder company, Germany.
Furthermore, it is shown that the match between the certified compositions and fundamental parameter computations is affected by the quality of available fundamental parameters for the ultralight elements as well as by the underlying mathematical models. Especially in quantitative analysis of these elements, a large variety of secondary enhancement effects must be taken into account. Two major mechanisms have been considered in the presented computations: excitation by fluorescence photons emitted from aiJ available excited atoms, and excitation by photoelectrons ejected after the primary ionization event. Their magnitude exceeds that of the conventional energy region by far and thus uncertainities in the corrective algorithms have a large effect,