The DualBeam, which combines focused ion beam and scanning electron microscope (FIB-SEM), is regularly used for sample preparation in transmission electron microscopy (TEM). A DualBeam enables the user to thin specific regions of a bulk material to electron transparency. While this process is often performed manually, we describe an interactive guided TEM sample preparation process. By this method, the preparation process time is shortened for expert users, compared to manual processes, and enables novice users to obtain high-quality results routinely. The method can be used on almost any material to prepare thin lamellas for most common TEM applications.

The mechanical behavior of nanocomposites is critically dependent on their structural composition. In this paper we use Focused Ion Beam (FIB) microscopy to prepare surfaces from a layered polymer nanocomposite for investigation using phase contrast atomic force microscopy (AFM). Phase contrast AFM provides mechanical information on the surface examined and, by combining with the sequential cross-sectioning of FIB, can extend the phase contract AFM into three dimensions.

Focused ion beam specimen preparation has been used for NiTi samples and SrTiO3/SrRuO3 multilayers with prevention of surface amorphization and Ga implantation by a 2-kV cleaning procedure. Transmission electron microscopy techniques show that the samples are of high quality with a controlled thickness over large scales. Furthermore, preferential thinning effects in multicompounds are avoided, which is important when analytical transmission electron microscopy measurements need to be interpreted in a quantitative manner. The results are compared to similar measurements acquired for samples obtained using conventional preparation techniques such as electropolishing for alloys and ion milling for oxides.