The SEST telescope has been used for a submillimeter water maser survey toward late-type stars. Six new 321 GHz water masers were detected. These, as well as the earlier reported sources, VY CMa and o Cet, were also observed in the vibrationally excited water maser line at 96 GHz. However, only VY CMa and o Cet showed the 96 GHz emission. The line velocity of o Cet is blueshifted, suggesting that the hot water vapor at 96 GHz takes part in the pulsation-shock motion of the Mira variable.