Feasibility of multiwavelength Raman spectroscopy was studied as a potentialin-line monitoring technique for grain size distribution in channel poly-Si usedin three dimensional stacked NAND (3D NAND) Flash memory devices. Variouschannel poly-Si materials in 3D-NAND Flash memory devices, converted fromchemical vapor deposition (CVD) grown a-Si, were characterized usingnon-contact, multiwavelength Raman spectroscopy and high resolutioncross-sectional transmission electron microscopy (HRXTEM). The Ramancharacterization results were compared with HRXTEM images. The correlationbetween the grain size distribution characterized by multiwavelength Ramanspectroscopy and “on current” (ION) of 3D NANDFlash memory devices was investigated. Good correlation between these techniqueswas seen. Multiwavelength Raman spectroscopy is very promising as anon-destructive in-line monitoring technique for grain size distribution inchannel poly-Si used in 3D NAND Flash memory devices.

Inflammatory bowel diseases (IBD) are chronically relapsing inflammatory disorders of the intestine. Although some therapeutic agents, including steroids, are available for the treatment of IBD, these agents have limited use. Therefore, dietary supplements have emerged as possible interventions for IBD. Japanese honeysuckle flower, the flower of Lonicera japonica, is a well-known dietary supplement and has been used to prevent or treat various inflammatory diseases. In the present study, we investigated the effects of L. japonica on experimental murine colitis. Colitis was induced by 5 % dextran sulphate sodium (DSS) in Balb/c mice. The water extract of L. japonica (LJE) at doses of 20, 100 or 500 mg/kg was orally administered to mice twice per day for 7 d. Body weight, colon length and a histological damage score were assessed to determine the effects on colitis. Cytokine profiles were assessed to examine the effects on helper T (Th) cell-related immunological responses. In addition, CD4+CD25+Foxp3+T cells were analysed in vivo and in vitro for investigating the effects on regulatory T (Treg) cells. LJE showed dose-dependent inhibitory effects against colon shortening, weight loss and histological damage. LJE down-regulated IL-1β, TNF-α, interferon-γ, IL-6, IL-12 and IL-17. However, LJE did not show any significant effects on IL-10, IL-23, transforming growth factor-β1 and Treg cell populations. In conclusion, LJE showed protective effects against DSS-induced colitis via the Th1/Th17 pathway and not via Treg cell-related mechanisms.

A 1MV AMS was installed in KIGAM (Korea Institute of Geoscience and Mineral Resources). After 4 months of installation, the AMS started normal operation from January 2008. This multi-element AMS was developed by HVEE to measure 14C, 10Be, and 26Al. The results of an acceptance test demonstrate that this machine is capable of routine 14C age dating and of measurements of other radioisotopes in terms of accuracy and precision as well as the background level. After installation, an investigation aimed at determining the stable operating conditions was conducted, and background levels were determined to be as low as 10–15 for 14C and 10–14 for 10Be and 26Al.

Electrical and structural properties of indium-tin-oxide (ITO) films on flexible polymer substrates were investigated. Room temperature sputtered ITO films on polymer substrates are initially amorphous but become partially crystalline as oxygen partial pressure decreases under 1.5%. The crystallinity shows more (400) and (222) preferentially oriented textures as decreasing of oxygen pressure resulting in lower resistivity. Moreover, an interesting growth property similar to 3D growth mechanism including larger grain size and columnar-like grain structure was also observed. It is considered that the columnar-like grain structure is probably attributed to the poor surface morphology of polymer substrates Based on the experiments, we obtained high performance ITO films on a polycarbonate substrate including 3.8 × 10 –4 Ω-cm in resistivity and transmittance above 80% in the visible ranges at 0.2% oxygen partial pressure.

The electrical and mechanical properties in indium-tin-oxide films deposited on polymer substrate were examined. The materials of substrates are polyethersulfone(PES), polycarbonate(PC), polyethylene terephthalate(PET) which have gas barrier layer and anti-glare coating for plastic-based devices. The experiments were performed by rf-magnetron sputtering using a special instrument and buffer layers. Therefore, we obtained a very flat polymer substrate deposited ITO film and investigated the effects of buffer layers, in addition to the instrument. Moreover, the influences of an oxygen partial pressure and post-deposition annealing in ITO films deposited on polymer substrates were clarified. X-ray diffraction observation, measurement of electrical property, and optical microscope observation were performed for the investigation of micro-structure and electro-mechanical properties. They indicated that as-deposited ITO thin films are amorphous and become quasi-crystalline after adjustment of oxygen partial pressure and thermal annealing above 180 °C. As the results, we obtained 20-25 Ω/ of ITO films with a good transmittance (above 80%) under 0.2 % oxygen contents and vacuum annealing. Furthermore, using organic buffer layer, we obtained ITO films which have rather high electrical resistance (40-45 Ω/ ) but have improved optical (more than 85%) and mechanical characteristics compared to the counterparts.

In this study, the quality of thin film diode (TFD) as a switching device for active-matrix liquid-crystal-displays (AM-LCDs) was enhanced by low temperature annealing conditions with high reliability and good electrical properties. Device was composed with Ta as bottom electrode, anodic Ta2O5 as insulator layer and top electrode. Two types of material such as Ti and Cr were evaluated as a top electrode of the TFD device to optimize the symmetry of current-voltage characteristic curve, respectively. The annealing was done at low temperature conditions below 350°C. The low temperature annealing improved the TFD device with nearly perfect symmetry under high electric field.

A reliable interconnection of electrodes to the flexible polymer substrate with anisotropic conductive film (ACF) of which the conductive particles were similar in elasticity to the substrates was accomplished. The contact resistance value was maintained even while the junction was stressed under sudden changes in temperature and pressure. We found that the conduction failure is caused by the action of a complex mechanism on the changes of a joint structure. The major driving factor seems likely to be defects in the transparent electrodes due to the thermal strain of the substrate and penetration of conductive particles into the substrate. The materials of substrate and conductive particle are polycarbonate (PC) with a gas barrier layer and poly-divinylbenzene (DVB) whose hardness is similar to that of the polymer substrate, respectively. In this paper, several experiments were performed with an emphasis on the properties of polymer substrates. Furthermore, the electrical and mechanical performance of the joint structure was studied by evaluating contact resistance and scanning electron microscope (SEM) observations. Moreover, for the experiments, we fabricated test IC with Au bumps through photolithography and electro-plating process. Conductive particle with elasticity similar to that of the polymer substrates did little damage to the transparent electrodes on the substrates, and low temperature and pressure under a stepped process did not bring about their deformation either. Consequently, we adopted the results on the fabrication of plastic based flat panel display module and thus could obtain a highly reliable interconnect with a low contact resistance ( 20-25ω ).