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X Wu, J Liu, WN Lennard, D Landheer
Composition Modulation in High-k Hafnium Silicate Films
Microscopy and Microanalysis
https://doi.org/10.1017/S1431927610059143 Published online by Cambridge University Press
2010-10-22T13:28:16+01:00
Not for further distribution unless allowed by the License or with the express written permission of Cambridge University Press.
https://doi.org/10.1017/S1431927610059143
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