Advanced Metallization and Processing for Semiconductor Devices and Circuits — II
Part of MRS Proceedings
- Avishay Katz, AT&T Bell Laboratories, New Jersey
- Shyam P. Murarka, Rensselaer Polytechnic Institute, New York
- Yves I. Nissim, France Telecom - CNET Bagneux, France
- James M. E. Harper, IBM T J Watson Research Center, New York
- Date Published: October 1992
- availability: Temporarily unavailable - available from TBC
- format: Hardback
- isbn: 9781558991552
Other available formats:
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