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4D-STEM Measurement of Thickness and Orientation by Bloch Wave Dynamical Diffraction Matching

Published online by Cambridge University Press:  22 July 2022

Steven E Zeltmann ,
Andrew M Minor  and
Colin Ophus
Steven E Zeltmann*
Affiliation:
Materials Science and Engineering Department, University of California Berkeley, Berkeley, CA, USA
Andrew M Minor
Affiliation:
Materials Science and Engineering Department, University of California Berkeley, Berkeley, CA, USA National Center for Electron Microscopy, Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA, USA
Colin Ophus
Affiliation:
National Center for Electron Microscopy, Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA, USA
*
*Corresponding author: steven.zeltmann@lbl.gov

Abstract

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Type
Developments of 4D-STEM Imaging - Enabling New Materials Applications
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 382 - 383
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Copyright
Copyright © Microscopy Society of America 2022

References

LeBeau, et al. , Phys Rev B 79(21), p. 214110.CrossRefGoogle Scholar
Ophus, et al. , Microscopy and Microanalysis (2021), p. 1.Google Scholar
DeGraef, in “Introduction to Conventional Transmission Electron Microscopy” (2003).Google Scholar
Madsen, and Susi, , Open Research Europe 1 (2021), p. 24.CrossRefGoogle Scholar
Savitzky, et al. , Microscopy and Microanalysis 27(4) (2021), p. 712.10.1017/S1431927621000477CrossRefGoogle Scholar
Work at the Molecular Foundry was supported by the Office of Science, Office of Basic Energy Sciences, of the U.S. Department of Energy under Contract No. DEAC02-05CH11231. SEZ was supported by the National Science Foundation under STROBE Grant No. DMR 1548924.Google Scholar