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Development of Monochromatic Analytical Electron Microscope Equipped with Higher-Order Aberration Corrector

Published online by Cambridge University Press:  05 August 2019

Masaki Mukai ,
Eiji Okunishi ,
Akiho Nakamura ,
Takaki Ishikawa  and
Hidetaka Sawada
Masaki Mukai*
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan
Eiji Okunishi
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan
Akiho Nakamura
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan
Takaki Ishikawa
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan
Hidetaka Sawada
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan
*
*Corresponding author: mmukai@jeol.co.jp

Abstract

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Type
Current Trends and Challenges in Electron Energy-Loss Spectroscopy
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 590 - 591
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Mukai, M., et al. : Microscopy, 64[3], (2015), 151-158.Google Scholar
[2]Mueller, H., et al. : Microsc. Microanal., 12 (2006), 442-455.Google Scholar
[3]Ishikawa, T., et al. : Microsc. Microanal., 13 (supple.3), (2015) 1599-1600Google Scholar
[4]Pennycook, S.: Ultramicroscopy, 180 (2017), 22-33Google Scholar