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High Resolution Low kV SEM EDS – Breaking Convention with Low Working Distance EDS

Published online by Cambridge University Press:  30 July 2020

Samuel Marks ,
Sharhid Jabar ,
Geoff West  and
Simon Burgess
Samuel Marks
Affiliation:
Oxford Instruments, High Wycombe, England, United Kingdom
Sharhid Jabar
Affiliation:
University of Warwick, Coventry, England, United Kingdom
Geoff West
Affiliation:
University of Warwick, Coventry, England, United Kingdom
Simon Burgess
Affiliation:
Oxford Instruments NanoAnalysis, High Wycombe, England, United Kingdom

Abstract

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Type
Advances in Quantitative Electron Beam Microanalysis (EDS and WDS)
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 2170 - 2172
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Copyright
Copyright © Microscopy Society of America 2020

References

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Burgess, S et al. Microscopy and Analysis 6 (2013): S8–S13.Google Scholar