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Improvement of TEM Spatial Resolution at Low Accelerating Voltages (15-30 kV) with Monochromator

Published online by Cambridge University Press:  25 July 2016

Shigeyuki Morishita ,
Masaki Mukai ,
Kazu Suenaga  and
Hidetaka Sawada
Shigeyuki Morishita
Affiliation:
JEOL Ltd., Akishima, Tokyo 196-8558Japan
Masaki Mukai
Affiliation:
JEOL Ltd., Akishima, Tokyo 196-8558Japan
Kazu Suenaga
Affiliation:
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba 305-8565, Japan
Hidetaka Sawada
Affiliation:
JEOL Ltd., Akishima, Tokyo 196-8558Japan

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 982 - 983
Copyright
© Microscopy Society of America 2016 

References

[1] Sawada, H., et al, Phys. Rev. Lett 114 (2015) 166102.CrossRefGoogle Scholar
[2] Kabius, B., et al, J. Electron Microsc 58 (2009) 147.CrossRefGoogle Scholar
[3] Mukai, M., et al, Ultramicroscopy 140 (2014) 37.CrossRefGoogle Scholar
[4] Morishita, S., et al, Appl. Phys. Lett 108 (2016) 013107.CrossRefGoogle Scholar
[5] This work was supported by the JST (Japan Science and Technology Agency) under the Research Acceleration Program (2012-2016).Google Scholar