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Low Energy Nano Diffraction (LEND) – Bringing true Diffraction to SEM

Published online by Cambridge University Press:  05 August 2019

Peter Schweizer*
Affiliation:
Institute of Micro- and Nanostructure Research (IMN) & Center for Nanoanalysis and Electron Microscopy (CENEM), Friedrich-Alexander University, Erlangen, Germany
Peter Denninger
Affiliation:
Institute of Micro- and Nanostructure Research (IMN) & Center for Nanoanalysis and Electron Microscopy (CENEM), Friedrich-Alexander University, Erlangen, Germany
Christian Dolle
Affiliation:
Institute of Micro- and Nanostructure Research (IMN) & Center for Nanoanalysis and Electron Microscopy (CENEM), Friedrich-Alexander University, Erlangen, Germany
Stefanie Rechberger
Affiliation:
Institute of Micro- and Nanostructure Research (IMN) & Center for Nanoanalysis and Electron Microscopy (CENEM), Friedrich-Alexander University, Erlangen, Germany
Erdmann Spiecker*
Affiliation:
Institute of Micro- and Nanostructure Research (IMN) & Center for Nanoanalysis and Electron Microscopy (CENEM), Friedrich-Alexander University, Erlangen, Germany

Abstract

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Type
Low Voltage, Low Energy Electron Microscopy Imaging and Analysis
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Schweizer, P, Dolle, C, and Spiecker, E, Sci. Adv. 4 (2018) eaat4712.Google Scholar
[2]Thompson, C V, Annu. Rev. Mater. Res. 42 (2012), 399-434.Google Scholar