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Article contents
Variable-Pressure Soft-Electron Beam Lithography (VP Soft-eBL)
Published online by Cambridge University Press: 05 August 2007
Extract
Extended abstract of a paper presented at Microscopy and Microanalysis 2007 in Ft. Lauderdale, Florida, USA, August 5 – August 9, 2007
- Type
- Research Article
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- © 2007 Microscopy Society of America