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Voltage Contrast Imaging with Energy-Controlled Signal in an FE-SEM.

Published online by Cambridge University Press:  01 August 2018

Y. Hashimoto ,
S. Takeuchi ,
T. Sunaoshi  and
Y. Yamazawa
Y. Hashimoto
Affiliation:
Application Development Dept., Hitachi High-Technologies Corporation, Kawasaki, Japan
S. Takeuchi
Affiliation:
Application Development Dept., Hitachi High-Technologies Corporation, Kawasaki, Japan
T. Sunaoshi
Affiliation:
Application Development Dept., Hitachi High-Technologies Corporation, Kawasaki, Japan
Y. Yamazawa
Affiliation:
Electron Microscope Systems Design 1 Dept., Hitachi High-Technologies Corporation, Hitachinaka, Japan

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 662 - 663
Copyright
© Microscopy Society of America 2018 

References

[1] Rosenkranz, R. J. Mater. Sci.: Mater. Electron 22, 1523 2011.Google Scholar
[2] Takeuchi, S., et al, Microsc. Microanal. 16(Suppl 2), 616 2010.Google Scholar
[3] Dikin, D. A., et al, Microsc. Microanal. 12(Suppl 2), 674 2006.Google Scholar