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Adsorption and Oxidation Effects in Microcrystalline Silicon

Published online by Cambridge University Press:  01 February 2011

T. Dylla ,
F. Finger  and
R. Carius
T. Dylla
Affiliation:
Institut für Photovoltaik, Forschungszentrum Jülich, 52425 Jülich, Germany Department of Physics, Syracuse University, Syracuse, NY 13244-1130USA
F. Finger
Affiliation:
Institut für Photovoltaik, Forschungszentrum Jülich, 52425 Jülich, Germany
R. Carius
Affiliation:
Institut für Photovoltaik, Forschungszentrum Jülich, 52425 Jülich, Germany
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Abstract

Electron spin resonance and conductivity measurements were used to study adsorption and oxidation effects on microcrystalline silicon with different structure compositions ranging from porous, highly crystalline to compact, mixed phase amorphous/crystalline. We found a correlation between active surface area and the magnitude of observed meta-stable and irreversible effects.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 762: Symposium A – Amorphous and Nanocrystalline Silicon-Based Films – 2003 , 2003 , A2.5
Copyright
Copyright © Materials Research Society 2003

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