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Dielectric Properties of Sputtered BST on Ir Electrodes

Published online by Cambridge University Press:  10 February 2011

B. E. White Jr ,
Peir Y. Chu ,
Sufi Zafar ,
V. Balu ,
D. Gentile ,
Robert E. Jones ,
Bo Jiang ,
Bradley Melnick ,
Deborah Taylor  and
Peter Zürcher
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B. E. White Jr
Affiliation:
Materials Research and Strategic Technologies, Motorola, 3501 Ed Bluestein Blvd., MD K: 10, Austin,TX 78721, USA
Peir Y. Chu
Affiliation:
Materials Research and Strategic Technologies, Motorola, 3501 Ed Bluestein Blvd., MD K: 10, Austin,TX 78721, USA
Sufi Zafar
Affiliation:
Materials Research and Strategic Technologies, Motorola, 3501 Ed Bluestein Blvd., MD K: 10, Austin,TX 78721, USA
V. Balu
Affiliation:
Materials Research and Strategic Technologies, Motorola, 3501 Ed Bluestein Blvd., MD K: 10, Austin,TX 78721, USA
D. Gentile
Affiliation:
Materials Research and Strategic Technologies, Motorola, 3501 Ed Bluestein Blvd., MD K: 10, Austin,TX 78721, USA
Robert E. Jones
Affiliation:
Materials Research and Strategic Technologies, Motorola, 3501 Ed Bluestein Blvd., MD K: 10, Austin,TX 78721, USA
Bo Jiang
Affiliation:
Materials Research and Strategic Technologies, Motorola, 3501 Ed Bluestein Blvd., MD K: 10, Austin,TX 78721, USA
Bradley Melnick
Affiliation:
Materials Research and Strategic Technologies, Motorola, 3501 Ed Bluestein Blvd., MD K: 10, Austin,TX 78721, USA
Deborah Taylor
Affiliation:
Materials Research and Strategic Technologies, Motorola, 3501 Ed Bluestein Blvd., MD K: 10, Austin,TX 78721, USA
Peter Zürcher
Affiliation:
Materials Research and Strategic Technologies, Motorola, 3501 Ed Bluestein Blvd., MD K: 10, Austin,TX 78721, USA
Sherry Gillespie
Affiliation:
Materials Research and Strategic Technologies, Motorola, 3501 Ed Bluestein Blvd., MD K: 10, Austin,TX 78721, USA
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Abstract

The dielectric constant and dispersion of sputtered barium strontium titanate (BST) thin films deposited on Ir electrodes have been measured as a function of frequency and dielectric film thickness. Based on the measured variation in capacitance density with BST film thickness, an interfacial capacitance and thin film capacitance have been extracted. The variation of the interfacial capacitance density and the thin film capacitance density with frequency indicates that the majority of dispersion measured for BST deposited on Ir electrodes is due to the interfacial capacitance, in contrast to results found for Pt electrodes [1]. The temperature dependence of the interfacial capacitance and thin film capacitance has also been measured for these electrodes.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 493: Symposium U – Ferroelectric Thin Film VI , 1997 , 165
Copyright
Copyright © Materials Research Society 1998

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References

REFERENCES

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