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High Rate Deposition of Stable Hydrogenated Amorphous Silicon in Transition from Amorphous to Microcrystalline Silicon

Published online by Cambridge University Press:  01 February 2011

Guofu Hou ,
Xinhua Geng ,
Xiaodan Zhang ,
Ying Zhao ,
Junming Xue ,
Huizhi Ren ,
Jian Sun ,
Dekun Zhang  and
Yueqin Xu
Guofu Hou
Affiliation:
Institute of Photoelectronics, Nankai University, Tianjin, 300071, P.R.China
Xinhua Geng
Affiliation:
Institute of Photoelectronics, Nankai University, Tianjin, 300071, P.R.China
Xiaodan Zhang
Affiliation:
Institute of Photoelectronics, Nankai University, Tianjin, 300071, P.R.China
Ying Zhao
Affiliation:
Institute of Photoelectronics, Nankai University, Tianjin, 300071, P.R.China
Junming Xue
Affiliation:
Institute of Photoelectronics, Nankai University, Tianjin, 300071, P.R.China
Huizhi Ren
Affiliation:
Institute of Photoelectronics, Nankai University, Tianjin, 300071, P.R.China
Jian Sun
Affiliation:
Institute of Photoelectronics, Nankai University, Tianjin, 300071, P.R.China
Dekun Zhang
Affiliation:
Institute of Photoelectronics, Nankai University, Tianjin, 300071, P.R.China
Yueqin Xu
Affiliation:
National Renewable Energy Laboratory, 1617 Cole Blvd, Golden CO80401, U.S.A
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Abstract

High rate deposition of high quality and stable hydrogenated amorphous silicon (a-Si:H) films were performed near the threshold of amorphous to microcrystalline phase transition using a very high frequency plasma enhanced chemical vapor deposition (VHF-PECVD) method. The effect of hydrogen dilution on optic-electronic and structural properties of these films was investigated by Fourier-transform infrared (FTIR) spectroscopy, Raman scattering and constant photocurrent method (CPM). Experiment showed that although the phase transition was much influenced by hydrogen dilution, it also strongly depended on substrate temperature, working pressure and plasma power. With optimized condition high quality and high stable a-Si:H films, which exhibit σph/σd of 4.4×106 and deposition rate of 28.8Å/s, have been obtained.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 762: Symposium A – Amorphous and Nanocrystalline Silicon-Based Films – 2003 , 2003 , A6.3
Copyright
Copyright © Materials Research Society 2003

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