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Mapping the ε” of Conducting Solid Films in Situ

Published online by Cambridge University Press:  10 February 2011

M. J. Werner  and
R. J. King
M. J. Werner
Affiliation:
KDC Technology Corp., 2011 Research Dr., Livermore CA 94550, mike@aimnet.com
R. J. King
Affiliation:
KDC Technology Corp., 2011 Research Dr., Livermore CA 94550, mike@aimnet.com
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Abstract

Two nondestructive microwave methods for sensing and mapping the local loss factor ε” of conducting solid films are described. Example results of both methods are compared to the low frequency sheet resistance as measured by two- and four-point probe methods. Specimens ranged from 26 to 10,000 ohms per square. Depending on the test frequency, spatial resolution of about 1 cm is achievable, as demonstrated by maps of ε”.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 430: Symposium O – Microwave Processing of Materials V , 1996 , 67
Copyright
Copyright © Materials Research Society 1996

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References

1. King, Ray J., U.S. Patent No. 5 334 941 (2 August 1994).Google Scholar
2. King, R.J. and Yen, Y.H., IEEE Trans. on Microwave Theory and Techniques MTT–29 (11), 1225–1231,(November 1981 ).Google Scholar