Ba2YCu3O7 films produced by co-evaporation of BaF2, Cu and Y onto <100> S1TiO3 substrates in an O2 ambient followed by post-annealing were analyzed using RBS, X-ray diffraction and Auger microscopy. These films exhibit Tc's (R=0) of =90K and a best Jc of > 1.0×106 A/cm2 at 81K for a =2500A thick film. RBS and Auger depth profiling limit the level of F present in the post-annealed films to <5 at. %, although F is evident in the as-deposited material. RBS channeling experiments yield a Xmin=31%, demonstrating the epitaxial quality of the films. X-ray diffraction shows that the films are predominantly oriented with c-axis perpendicular to the substrate, with narrow mosaic spread in-plane. A small portion of the film is in the form of needles oriented with a-axis perpendicular to the substrate, whose areal density is dependent on annealing conditions and local film stoichiometry. Scanning Auger microscopy confirms that the needles and c-axis plateaus have the same metal and oxygen stoichiometry. Also present in the film are insulating balls which appear to nucleate terraces in the c-axis perpendicular structure. Scanning Auger shows that these features are also close to the metals stoichiometry, but are C rich compared to the needles. The plateaus are covered with =11 times more C than the needles, indicating that the basal plane surface is highly reactive. Auger depth profiling and RBS show little evidence for interdiffusion.