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Penetration of Tagged Organics into Caulked and Un-caulked Porous Dielectrics Measured by Rutherford Backscattering

Published online by Cambridge University Press:  01 February 2011

Robert D. Geil ,
Jay J. Senkevich  and
Bridget R. Rogers
Robert D. Geil
Affiliation:
r.geil@vanderbilt.edu, Vanderbilt University, Chemical Engineering, VU Station B 351604, 24th & Garland Avenues, 107 Olin Hall, Nashville, TN, 37235-1604, United States
Jay J. Senkevich
Affiliation:
jsenkevich@brewerscience.com, Brewer Science Inc., Rolla, MO, 65401, United States
Bridget R. Rogers
Affiliation:
bridget.rogers@vanderbilt.edu, Vanderbilt University, Chemical Engineering, VU Station B 351604, 24th & Garland Avenues, 107 Olin Hall, Nashville, TN, 37235-1604, United States
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Abstract

A novel method for studying the penetration of wet chemicals into caulked and uncaulked porous dielectrics was developed, and the barrier properties of parylene X were evaluated. Rutherford backscattering spectrometry (RBS) was used to study the penetration of chlorine-tagged organics, 3-chloro-1-propanol and a %5 HCl solution. After one minute of exposure time, eight times more 3-chloro-1-propanol diffused through uncaulked porous dielectric compared to caulked porous dielectric. Penetration from the side of the samples was found to be insignificant.

Keywords

microelectronicsRutherford backscattering (RBS)diffusion
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 990: Symposium B – Materials, Processes, Integration and Reliability in Advanced Interconnects for Micro- and Nanoelectronics , 2007 , 0990-B03-02
Copyright
Copyright © Materials Research Society 2007

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References

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