Symposium S – Microelectromechanical Systems—Materials and Devices IV
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Author and Subject Indexes
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- Published online by Cambridge University Press:
- 20 February 2017, pp. 205-207
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Research Article
Mechanism of hole inlet closure in shape transformation of hole arrays on Si(001) substrates by hydrogen annealing
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- 20 January 2011, mrsf10-1299-s04-04
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A Picowatt Energy Harvester
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- 20 January 2011, mrsf10-1299-s12-03
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Thin film amorphous silicon bulk-mode disk resonators fabricated on glass substrates
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- 20 January 2011, mrsf10-1299-s07-04
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Residual Stress in Sputtered Silicon Oxycarbide Thin Films
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- 20 January 2011, mrsf10-1299-s09-10
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Fabrication and Characterization of MEMS-Based Structures from a Bio-Inspired, Chemo-Responsive Polymer Nanocomposite
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- 20 January 2011, mrsf10-1299-s04-07
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Patterning Nanomaterials on Fragile Micromachined Structures using Electron Beam Lithography
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- 20 January 2011, mrsf10-1299-s01-09
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Reliability and stability of thin-film amorphous silicon MEMS on glass substrates
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- 01 March 2011, mrsf10-1299-s04-08
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SU8 / modified MWNT composite for piezoresistive sensor application
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- 20 January 2011, mrsf10-1299-s04-11
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Biodegradable Microfluidic Scaffolds with Tunable Degradation Properties from Amino Alcohol-based Poly(ester amide) Elastomers
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- 01 March 2011, mrsf10-1299-s11-02
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Characterization of Group III-Nitride Based Surface Acoustic Wave Devices for High Temperature Applications
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- 01 March 2011, mrsf10-1299-s09-13
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Development of a Robust Design of a Wet Etched Co-integrated Pressure Sensor
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- 20 January 2011, mrsf10-1299-s06-03
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Ultrafine Silicon Nano-wall Hollow Needles and Applications in Inclination Sensor and Gas Transport
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- 20 January 2011, mrsf10-1299-s05-05
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Contact Resistivity of Laser Annealed SiGe for MEMS Structural Layers Deposited at 210°C
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- 20 January 2011, mrsf10-1299-s02-05
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Characterization of Textured PZT Thin Films Prepared by Sol-gel Method onto Stainless Steel Substrates
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- 28 January 2011, mrsf10-1299-s09-20
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Solid Bridging during Pattern Collapse (Stiction) Studied on Silicon Nanoparticles
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- 01 March 2011, mrsf10-1299-s09-29
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PZT Thick Films for 100 MHz Ultrasonic Transducers Fabricated Using Chemical Solution Deposition Process
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- 01 March 2011, mrsf10-1299-s04-02
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Characterization of Hydrophobic Forces for in Liquid Self-Assembly of Micron-Sized Functional Building Blocks
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- 01 March 2011, mrsf10-1299-s08-04
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Pt/TiO2 Growth Templates for Enhanced PZT films and MEMS Devices
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- 20 January 2011, mrsf10-1299-s02-04
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High Yield Polymer MEMS Process for CMOS/MEMS Integration
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- 20 January 2011, mrsf10-1299-s04-12
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