12 results
Effect of Oxidizer on Chemical Vapor Deposited Hafnium Oxide-Based Nanostructures and the Engineering of their Interfaces with Si(100)
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 996 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 0996-H05-10
- Print publication:
- 2007
-
- Article
- Export citation
Investigation of Local Coordination and Electronic Structure of Dielectric Thin Films from Theoretical Energy-Loss Spectra
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 996 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 0996-H05-27
- Print publication:
- 2007
-
- Article
- Export citation
Characterization of Atomic Layer Deposited Ultrathin HfO2 Film as a Diffusion Barrier in Cu Metallization
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 990 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 0990-B09-03
- Print publication:
- 2007
-
- Article
- Export citation
Evaluation and Testing of Organometallic Precursor for Copper Direct-Write
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 1002 / 2007
- Published online by Cambridge University Press:
- 17 March 2011, 1002-N07-23
- Print publication:
- 2007
-
- Article
- Export citation
Low temperature Si0.85 Ge0.15 oxynitridation in wet-nitric oxide ambient
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 765 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, D3.26
- Print publication:
- 2003
-
- Article
- Export citation
Low Temperature Oxynitridation of SiGe in NO/N2O Ambients
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 715 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, A10.6
- Print publication:
- 2002
-
- Article
- Export citation
On the Argon Annealing-Based Improvements of the Properties of Ultra-Thin Oxynitrides Nitrided with NH3
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 716 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, B4.10
- Print publication:
- 2002
-
- Article
- Export citation
Metalorganic chemical vapor deposition of aluminum oxide on silicon nitride
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 751 / 2002
- Published online by Cambridge University Press:
- 11 February 2011, Z3.45
- Print publication:
- 2002
-
- Article
- Export citation
Apriori Process-Property Relationships of GaN Epitaxial Growth in Ga/N/H/C/O Systems
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 693 / 2001
- Published online by Cambridge University Press:
- 21 March 2011, I3.19.1
- Print publication:
- 2001
-
- Article
- Export citation
Process-Structure Relationships of Nitrided Oxides and Oxynitrides
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 686 / 2001
- Published online by Cambridge University Press:
- 15 March 2011, A10.4
- Print publication:
- 2001
-
- Article
- Export citation
Angle-Resolved XPS Studies of Interfacial Bonding States in Silicon oxynitrides Fabricated Using Different Thermal Methodologies
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 586 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 99
- Print publication:
- 1999
-
- Article
- Export citation
Process Improvements for Reductions in Total Charge and Interface Trap Densities of Thermally-Grown Sub-3.5nm-Thick Silicon Nitrides
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 592 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 213
- Print publication:
- 1999
-
- Article
- Export citation