4 results
Tensile Test of Bulk- and Surface-Micromachined 0.1-νm Thick Silicon Film using Electrostatic Force Grip System
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- Journal:
- MRS Online Proceedings Library Archive / Volume 687 / 2001
- Published online by Cambridge University Press:
- 15 March 2011, B5.45
- Print publication:
- 2001
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Formation process of interface states at grain boundaries in sputtered polycrystalline Si films
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- Journal:
- Journal of Materials Research / Volume 14 / Issue 2 / February 1999
- Published online by Cambridge University Press:
- 31 January 2011, pp. 371-376
- Print publication:
- February 1999
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Tensile Strength and Fracture Toughness of Surface Micromachined Polycrystalline Silicon Thin Films Prepared Under Various Conditions
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- Journal:
- MRS Online Proceedings Library Archive / Volume 505 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 285
- Print publication:
- 1997
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Integrated Pyroelectric Infrared Sensor Using Pvdf thin Film Deposited by Electro-Spray Method
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- Journal:
- MRS Online Proceedings Library Archive / Volume 310 / 1993
- Published online by Cambridge University Press:
- 21 February 2011, 79
- Print publication:
- 1993
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