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In Situ Probing and Atomistic Simulation of a-Si:H Plasma Deposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 664 / 2001
- Published online by Cambridge University Press:
- 17 March 2011, A1.1
- Print publication:
- 2001
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Atomic-Scale Analysis of Plasma-Enhanced Chemical Vapor Deposition from SiH4/2 Plasmas on Si Substrates
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- Journal:
- MRS Online Proceedings Library Archive / Volume 507 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 673
- Print publication:
- 1998
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Atomic-Scale Analysis of the Reactivity of Radicals from Silane/Hydrogen Plasmas with Silicon Surfaces
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- Journal:
- MRS Online Proceedings Library Archive / Volume 485 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 107
- Print publication:
- 1997
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