1 results
Thermal Stability of Hf-based High-κ Dielectric Films on Si(100)
-
- Journal:
- Microscopy and Microanalysis / Volume 9 / Issue S02 / August 2003
- Published online by Cambridge University Press:
- 22 July 2003, pp. 506-507
- Print publication:
- August 2003
-
- Article
-
- You have access
- Export citation