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3D Determination of Grain Shape in FeAl by Focused Ion Beam (FIB) Tomography

Published online by Cambridge University Press:  02 July 2020

B.J. Inkson  and
G. Mobus
B.J. Inkson
Affiliation:
Department of Materials, Oxford University, Parks Road, Oxford, OX1 3PH, U.K.
G. Mobus
Affiliation:
Department of Materials, Oxford University, Parks Road, Oxford, OX1 3PH, U.K.
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Abstract

Techniques for the 3D analysis of materials at the sub-micron level are of major importance for understanding the structure and performance of new nanoengineered materials. Established techniques for determining 3D shapes of individual grains include X-ray tomography and light microscopy for grains ≫ 1μm, and 3D-atom probe for conducting grains < 50nm size. A new technique of TEM EELS tomography is being developed for particles 2-300nm in a chemically distinct matrix.

For the grain size range 200nm-20μm, we have applied a new technique of 3D analysis using focused ion beam (FIB) sectioning to the site-specific analysis of the shape of individual grains in a single phase matrix. in the 3D FIB technique, a sample surface may be serially sectioned using a highly focused beam of Ga+ ions (Fig. 1). A sequential set of 2D secondary electron images through the sample can be aligned in 3D by cross-correlation of the position of reference markers in the 2D images.

Type
Applications and Developments of Focused Ion Beam (FIB) Instruments (Organized by L. Giannuzzi)
Information
Microscopy and Microanalysis , Volume 7 , Issue S2: Proceedings: Microscopy & Microanalysis 2001, Microscopy Society of America 59th Annual Meeting, Microbeam Analysis Society 35th Annual Meeting, Long Beach, California August 5-9, 2001 , August 2001 , pp. 936 - 937
Copyright
Copyright © Microscopy Society of America 2001

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References

references

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