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3D EDS Applications Using Destructive and Non-Destructive FIB-Based Techniques

Published online by Cambridge University Press:  27 August 2014

Neal Magdefrau ,
Julie Wittenzellner ,
Daniel Goberman ,
Richard McLaughlin  and
Sreenivas Bhattiprolu
Neal Magdefrau
Affiliation:
United Technologies Research Center, East Hartford, CT 06108
Julie Wittenzellner
Affiliation:
United Technologies Research Center, East Hartford, CT 06108
Daniel Goberman
Affiliation:
United Technologies Research Center, East Hartford, CT 06108
Richard McLaughlin
Affiliation:
Oxford Instruments America, Inc., Concord, MA 01742
Sreenivas Bhattiprolu
Affiliation:
Oxford Instruments America, Inc., Concord, MA 01742

Abstract

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Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 798 - 799
Copyright
Copyright © Microscopy Society of America 2014