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Advancing the Hexapole Cs-Corrector for the Scanning Transmission Electron Microscope

Published online by Cambridge University Press:  11 October 2006

Heiko Müller ,
Stephan Uhlemann ,
Peter Hartel  and
Maximilian Haider
Heiko Müller
Affiliation:
Corrected Electron Optical Systems GmbH, Englerstr. 28, D-69126 Heidelberg, Germany
Stephan Uhlemann
Affiliation:
Corrected Electron Optical Systems GmbH, Englerstr. 28, D-69126 Heidelberg, Germany
Peter Hartel
Affiliation:
Corrected Electron Optical Systems GmbH, Englerstr. 28, D-69126 Heidelberg, Germany
Maximilian Haider
Affiliation:
Corrected Electron Optical Systems GmbH, Englerstr. 28, D-69126 Heidelberg, Germany
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Abstract

Aberration correctors using hexapole fields have proven useful to correct for the spherical aberration in electron microscopy. We investigate the limits of the present design for the hexapole corrector with respect to minimum probe size for the scanning transmission electron microscope and discuss several ways in which the design could be improved by rather small and incremental design changes for the next generation of advanced probe-forming systems equipped with a gun monochromator.

Keywords

aberrationcorrectorSTEMhexapolemonochromatorprobe sizeresolution
Type
Research Article
Information
Microscopy and Microanalysis , Volume 12 , Issue 6: Special Issue: Frontiers of Electron Microscopy in Materials Science , December 2006 , pp. 442 - 455
Copyright
© 2006 Microscopy Society of America

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References

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