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Complex Characterization of Interlayer Systems in Semiconductors Industry Using Imaging and Analytical TEM

Published online by Cambridge University Press:  05 September 2003

Uwe Muehle ,
Lutz Hillmann  and
Sören Jansen
Uwe Muehle
Affiliation:
Physical Failure Analysis, Infineon Technologies Dresden, D-01099 Dresden, Germany
Lutz Hillmann
Affiliation:
Physical Failure Analysis, Infineon Technologies Dresden, D-01099 Dresden, Germany
Sören Jansen
Affiliation:
Institute of Physical Metallurgy, University of Mining and Technology Freiberg, D-09596 Freiberg, Germany
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Abstract

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Type
Invited Papers
Information
Microscopy and Microanalysis , Volume 9 , Issue S03 , September 2003 , pp. 228 - 229
Copyright
Copyright © Microscopy Society of America 2003

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