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Advances in Multi-Beam and Multi-Ion FIB-SEM for 3D Correlative Microscopy

Published online by Cambridge University Press:  05 August 2019

B. Winiarski ,
R. Geurts ,
S.J. Randolph ,
R. Gannon ,
G. Pyka ,
T. Varslot  and
P.J. Withers
B. Winiarski*
Affiliation:
Thermo Fisher Scientific, V.Pecha 12, Brno 627 00, Czech Republic Henry Royce Institute, School of Materials, The University of Manchester, M13 9PL, U.K.
R. Geurts
Affiliation:
Thermo Fisher Scientific, Achtseweg Noord 5, 5651 GG Eindhoven, Netherlands
S.J. Randolph
Affiliation:
Thermo Fisher Scientific, 5350 NE Dawson Creek Dr, Hillsboro, OR 97124, USA
R. Gannon
Affiliation:
Thermo Fisher Scientific, 5350 NE Dawson Creek Dr, Hillsboro, OR 97124, USA
G. Pyka
Affiliation:
Thermo Fisher Scientific, V.Pecha 12, Brno 627 00, Czech Republic
T. Varslot
Affiliation:
Thermo Fisher Scientific, Stiklestadveien 1, 7041 Trondheim, Norway
P.J. Withers
Affiliation:
Henry Royce Institute, School of Materials, The University of Manchester, M13 9PL, U.K.
*
*Corresponding author: Bartlomiej.Winiarski@thermofisher.com

Abstract

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Type
Advances in Focused Ion Beam Instrumentation and Techniques
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 870 - 871
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Winiarski, B et al. , Supplement of Microscopy and Microanalysis 152 (2017), p. S4-S9.Google Scholar
[2]Winiarski, B et al. , Microscopy and Microanalysis 23 (S1/2017), p. 342-343.Google Scholar
[3]Burnett, TL et al. , Scientific Reports 4 (2014), p. 4711.Google Scholar
[4]Randolph, SJ et al. , Journal of Vacuum Science & Technology B36 (2018), p. 06JB01.Google Scholar
[5]Echlin, MP and Mottura, A et al. , Review of Scientific Instruments 83 (2012), p. 023701.Google Scholar
[6]Winiarski, B et al. , Microscopy and Microanalysis 24 (S1/2018), p. 366-367.Google Scholar