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Advances in Sample Preparation of Semiconductor Devices for Electron Microscopy

Published online by Cambridge University Press:  24 July 2003

Wolfgang Gruenewald
Wolfgang Gruenewald*
Affiliation:
BAL-TEC Innovation Centre, Chemnitz, Germany

Abstract

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Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 800 - 801
Copyright
Copyright © Microscopy Society of America 2003