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Analysis of Microstructure and Texture of Thin Films by Coupled Use of EBSD and Other Scanning Techniques

Published online by Cambridge University Press:  05 September 2003

H. Wendrock
Affiliation:
Institute of Solid State and Materials Research Dresden, P.O.Box 270016, 01171 Dresden, Germany
S. Menzel
Affiliation:
Institute of Solid State and Materials Research Dresden, P.O.Box 270016, 01171 Dresden, Germany
D. Rauser
Affiliation:
Institute of Solid State and Materials Research Dresden, P.O.Box 270016, 01171 Dresden, Germany
K. Wetzig
Affiliation:
Institute of Solid State and Materials Research Dresden, P.O.Box 270016, 01171 Dresden, Germany
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Abstract

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Type
Invited Papers
Copyright
Copyright © Microscopy Society of America 2003

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