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Analysis of Thin Phase-Shifter Films using Surface Analysis Techniques

Published online by Cambridge University Press:  25 July 2016

Vincent S. Smentkowski ,
Laurie LeTarte ,
Hong Piao  and
Michael Marko
Vincent S. Smentkowski
Affiliation:
General Electric Global Research Center, 1 Research Circle, Niskayuna NY 12309
Laurie LeTarte
Affiliation:
General Electric Global Research Center, 1 Research Circle, Niskayuna NY 12309
Hong Piao
Affiliation:
General Electric Global Research Center, 1 Research Circle, Niskayuna NY 12309
Michael Marko
Affiliation:
Wadsworth Center, Empire State Plaza, P.O. Box 509, Albany NY 12201-0509

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 394 - 395
Copyright
© Microscopy Society of America 2016 

References

References:

[1] Glaeser, R. Rev. Sci. Instr 84 (2013). p. 111101.Google Scholar