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Application of Low Accelerating Voltage Aberration Corrected Dedicated STEM With Cold FEG.

Published online by Cambridge University Press:  26 July 2009

M Konno ,
Y Suzuki ,
K Nakamura  and
H Inada
M Konno
Affiliation:
Hitachi High-Technologies,Japan
Y Suzuki
Affiliation:
Hitachi High-Technologies,Japan
K Nakamura
Affiliation:
Hitachi High-Technologies,Japan
H Inada
Affiliation:
Hitachi High-Technologies,Japan

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Information
Microscopy and Microanalysis , Volume 15 , Supplement S2 , July 2009 , pp. 4 - 5
Copyright
Copyright © Microscopy Society of America 2009