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Ar+ FIB Milling and Measurement of FIB Damage in Silicon

Published online by Cambridge University Press:  05 August 2019

Brandon Van Leer ,
Huikai Cheng  and
Mikhail Dutka
Brandon Van Leer
Affiliation:
Thermo Fisher Scientific, 5350 NW Dawson Creek Drive, Hillsboro, ORUSA.
Huikai Cheng
Affiliation:
Thermo Fisher Scientific, 5350 NW Dawson Creek Drive, Hillsboro, ORUSA.
Mikhail Dutka
Affiliation:
Thermo Fisher Scientific, Materials & Structural Analysis, Eindhoven, the Netherlands.

Abstract

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Type
Advances in Focused Ion Beam Instrumentation and Techniques
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 886 - 887
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Giannuzzi, LA et al. , Microscopy and Microanalysis 11 (2005).Google Scholar
[2]Van Leer, B et al. , Microscopy and Microanalysis (2013).Google Scholar
[3]Ziegler, JF and Biersack, JP, SRIM 2003, www.SRIM.com.Google Scholar