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Assessment of Integrated Sub-Micron Polysilicon Fuses for Low Voltage CMOS Applications

Published online by Cambridge University Press:  01 August 2002

Jake Schaper ,
Theresa Hopson  and
Alex VanVianen
Jake Schaper
Affiliation:
Motorola Semiconductor Products Sector, Arizona Product Analysis Lab 2100 E. Elliot Road, Tempe, AZ 85284
Theresa Hopson
Affiliation:
Motorola Physical Sciences Research Labs, 7700 S. River Parkwy, Tempe, AZ 85284
Alex VanVianen
Affiliation:
Motorola Semiconductor Products Sector, Arizona Product Analysis Lab 2100 E. Elliot Road, Tempe, AZ 85284

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 1184 - 1185
Copyright
Copyright © Microscopy Society of America 2002