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Automated Sample Preparation of Nanoscale Devices for FESEM

Published online by Cambridge University Press:  26 July 2009

RR Cerchiara ,
PE Fischione ,
MF Boccabella  and
AC Robins
RR Cerchiara
Affiliation:
E A Fischione Instruments,Inc
PE Fischione
Affiliation:
E A Fischione Instruments,Inc
MF Boccabella
Affiliation:
E A Fischione Instruments,Inc
AC Robins
Affiliation:
E A Fischione Instruments,Inc

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Information
Microscopy and Microanalysis , Volume 15 , Supplement S2 , July 2009 , pp. 1076 - 1077
Copyright
Copyright © Microscopy Society of America 2009