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Beam Damage by Transmission Electron Microscopy in FinFet Structures

Published online by Cambridge University Press:  30 July 2020

Guoda Lian ,
Malik Ali ,
Steve Boettcher ,
John Bruley ,
Joyce Acoccella ,
Timothy Yeow ,
Dong Tang  and
Ioannis Alexandrou
Guoda Lian
Affiliation:
IBM, Hopewell Junction, New York, United States
Malik Ali
Affiliation:
IBM, Hopewell Junction, New York, United States
Steve Boettcher
Affiliation:
IBM, Hopewell Junction, New York, United States
John Bruley
Affiliation:
IBM, Yorktown Height, New York, United States
Joyce Acoccella
Affiliation:
IBM, Hopewell Junction, New York, United States
Timothy Yeow
Affiliation:
ThermoFisher Scientific, Eindhoven, Noord-Holland, Netherlands
Dong Tang
Affiliation:
ThermoFisher Scientific, Eindhoven, Noord-Holland, Netherlands
Ioannis Alexandrou
Affiliation:
ThermoFisher Scientific, Eindhoven, Noord-Holland, Netherlands

Abstract

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Type
Advances in Electron Microscopy to Characterize Materials Embedded in Devices
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 1624 - 1625
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Copyright
Copyright © Microscopy Society of America 2020

References

Cazaux, J., Ultramicroscopy 60 (1995) P41110.1016/0304-3991(95)00077-1CrossRefGoogle Scholar
Jiang, N., Report on Progress in Physics 79 (2016), p. 01650110.1088/0034-4885/79/1/016501CrossRefGoogle Scholar