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Circuit Editing and Failure Analysis Applications using a Three-Ion-Beam (Ga, He and Ne) System and Gas Injection System (GIS)

Published online by Cambridge University Press:  23 September 2015

Deying Xia ,
Huimeng Wu ,
Bernhard Geotze ,
David Ferranti ,
Lewis Stern  and
John Notte
Deying Xia
Affiliation:
Carl Zeiss Microscopy, LLC, Ion Microscopy Innovation Center, One Corporation Way, Peabody, MA 01960
Huimeng Wu
Affiliation:
Carl Zeiss Microscopy, LLC, Ion Microscopy Innovation Center, One Corporation Way, Peabody, MA 01960
Bernhard Geotze
Affiliation:
Carl Zeiss Microscopy, LLC, Ion Microscopy Innovation Center, One Corporation Way, Peabody, MA 01960
David Ferranti
Affiliation:
Carl Zeiss Microscopy, LLC, Ion Microscopy Innovation Center, One Corporation Way, Peabody, MA 01960
Lewis Stern
Affiliation:
Carl Zeiss Microscopy, LLC, Ion Microscopy Innovation Center, One Corporation Way, Peabody, MA 01960

Abstract

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Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 1165 - 1166
Copyright
Copyright © Microscopy Society of America 2015