No CrossRef data available.
Article contents
Comprehensive Nanofabrication by Correlating Crossbeam and ORION Nanofab
Published online by Cambridge University Press: 27 August 2014
Abstract
An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
![Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'](https://static.cambridge.org/content/id/urn%3Acambridge.org%3Aid%3Aarticle%3AS1431927614006734/resource/name/firstPage-S1431927614006734a.jpg)
- Type
- Abstract
- Information
- Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 1002 - 1003
- Copyright
- Copyright © Microscopy Society of America 2014
References
[1]
Ward, B., Notte, J.A. & Economou, N.P. Helium Ion Microscopy, Photonics Spectra 41.8 (2007),p. 68-70.Google Scholar