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Computer-Controlled In Situ Gas Reactions via a MEMS-based Closed-Cell System

Published online by Cambridge University Press:  23 September 2015

L. F. Allard ,
W. C. Bigelow ,
Z. Wu ,
S. H. Overbury ,
K. A. Unocic ,
M. Chi ,
W. B. Carpenter ,
F. S. Walden ,
R. L. Thomas  and
D. S. Gardiner
...Show all authors
L. F. Allard
Affiliation:
Physical Sciences Directorate, Oak Ridge National Laboratory, Oak Ridge, TN, USA
W. C. Bigelow
Affiliation:
Department of Materials Science & Engineering, University of Michigan, Ann Arbor, MI, USA
Z. Wu
Affiliation:
Physical Sciences Directorate, Oak Ridge National Laboratory, Oak Ridge, TN, USA
S. H. Overbury
Affiliation:
Physical Sciences Directorate, Oak Ridge National Laboratory, Oak Ridge, TN, USA
K. A. Unocic
Affiliation:
Physical Sciences Directorate, Oak Ridge National Laboratory, Oak Ridge, TN, USA
M. Chi
Affiliation:
Physical Sciences Directorate, Oak Ridge National Laboratory, Oak Ridge, TN, USA
W. B. Carpenter
Affiliation:
Protochips, Inc., Raleigh, NC, USA
F. S. Walden
Affiliation:
Protochips, Inc., Raleigh, NC, USA
R. L. Thomas
Affiliation:
Protochips, Inc., Raleigh, NC, USA
D. S. Gardiner
Affiliation:
Protochips, Inc., Raleigh, NC, USA
B. W. Jacobs
Affiliation:
Protochips, Inc., Raleigh, NC, USA
D. P. Nackashi
Affiliation:
Protochips, Inc., Raleigh, NC, USA
J. Damiano
Affiliation:
Protochips, Inc., Raleigh, NC, USA

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 97 - 98
Copyright
Copyright © Microscopy Society of America 2015 

References

[1] Allard, LF, et al., Microsc. Microanal 18, 2012). p. 656.Google Scholar
[2] Creemer, JF, et al., Ultramicroscopy 108(9, 2008). p. 993.Google Scholar
[3] Xin, HL, et al., Microsc Microanal 19, 2013). p. 1.Google Scholar
[4] Allard, LF, et al., Microsc. Microanal 20(Suppl 3, 2014). p. 1572.Google Scholar
[5] Microscopy research at ORNL sponsored in part by the U.S. Dept. of Energy (DOE), Office of Energy Efficiency and Renewable Energy, Vehicle Technologies Program, as part of the Propulsion Materials Program, and (ZW and SO) by the DOE Office of Science, Basic Energy Sciences, under Award # ERKCC96.Google Scholar