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Design of an Analytical TEM/STEM with 0.3 srad EDX Detection

Published online by Cambridge University Press:  01 August 2005

H S von Harrach ,
P C Tiemeijer  and
J Ringnalda
H S von Harrach
Affiliation:
FEI Electron Optics, Eindhoven, The Netherlands
P C Tiemeijer
Affiliation:
FEI Electron Optics, Eindhoven, The Netherlands
J Ringnalda
Affiliation:
FEI Electron Optics, Eindhoven, The Netherlands

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 704 - 705
Copyright
© 2005 Microscopy Society of America