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Development of Sample Preparation Method for Observation of Dopant Profile by Electron Holography

Published online by Cambridge University Press:  03 August 2008

T Sato ,
H Matsumoto ,
M Konno ,
M Fukui ,
S Mamishin ,
Y Taniguchi  and
H Kasai
T Sato
Affiliation:
Hitachi High-Technologies Corporation
H Matsumoto
Affiliation:
Hitachi High-Technologies Corporation
M Konno
Affiliation:
Hitachi High-Technologies Corporation
M Fukui
Affiliation:
Hitachi High-Technologies Corporation
S Mamishin
Affiliation:
Hitachi High-Technologies Corporation
Y Taniguchi
Affiliation:
Hitachi High-Technologies Corporation
H Kasai
Affiliation:
Hitachi Ltd
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Information
Microscopy and Microanalysis , Volume 14 , Supplement S2 , August 2008 , pp. 836 - 837
Copyright
© 2008 Microscopy Society of America

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